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Sputtering by particle bombardment: experiments and...

Sputtering by particle bombardment: experiments and computer calculations from threshold to MeV energies

Rainer Behrisch, Rainer Behrisch, Wolfgang Eckstein
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This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and their dependence on the incident energy and angle of incidence, as well as the energy and angular distributions of the sputtered atoms are presented. This concerns experimentally determined yields as well as a critical evaluation of the computational methods used to calculate the yields and distributions. The energies of the incident ions cover the range between a few eV up to several MeV. The influence of chemical effects between the incident ions and the atoms of the bombarded solid on the sputtering yields are also reviewed.

درجه (قاطیغوری(:
کال:
2007
خپرونه:
1
خپرندویه اداره:
Springer
ژبه:
english
صفحه:
526
ISBN 10:
3540445005
ISBN 13:
9783540445005
لړ (سلسله):
Topics in Applied Physics
فایل:
PDF, 11.95 MB
IPFS:
CID , CID Blake2b
english, 2007
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